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- W2378149509 abstract "The ion energy and the density of beam flux of cold cathode ion source were measured by pentagrid probing and Faraday cup.When the flux of Ar was 20 sccm,the measured distribution of ion energy was in the range of 400-820 eV,and the density of beam flux around 7.8-52.8 μA/cm2.When the mass flux of O2 was 20 sccm,TiO2 films was deposited by IBAD in the different ion energy.The optical properties of TiO2 films was studied,the result showed the refractive index of films was 2.3,which elosed with the property of bulk material." @default.
- W2378149509 created "2016-06-24" @default.
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- W2378149509 date "2007-01-01" @default.
- W2378149509 modified "2023-09-22" @default.
- W2378149509 title "The Relation of Ion Parameter and the Optical Properties of Films by IBAD" @default.
- W2378149509 hasPublicationYear "2007" @default.
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