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- W2378452725 abstract "RIE of Si using SF 6 /O 2 /CHF 3 plasmas was studied. The characteristics of the etch process are explored using a statistical experimental design. Etch rate and selectivity are examined as a function of SF 6 flow, O 2 flow, CHF 3 flow, pressure and the RF power in order to optimize etching condition. The effects of the variables on the measured responses and the etch mechanism are discussed. It is found that the addition of CHF 3 to the SF 6 /O 2 plasma can produce more smooth etch surface." @default.
- W2378452725 created "2016-06-24" @default.
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- W2378452725 date "2005-01-01" @default.
- W2378452725 modified "2023-09-25" @default.
- W2378452725 title "Study on Reactive Ion Etching of Silicon in SF_6/O_2/CHF_3 Mixtures" @default.
- W2378452725 hasPublicationYear "2005" @default.
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