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- W2378617704 abstract "In this paper, preparation of silicon nitride by trichlorosilane and ammonia as raw materials, via low pressure chemical vapor deposition (LPCVD) process is investigated. The influencing parameters on deposition rate are investigated, and the composition and structure of as-deposited films are characterized by IR, XRD and hardness measurement. The process parameters, including carrying gas, ratio of raw materials and deposition temperature, exert great influences on deposition rate, and the optimum parameters are as following: nitrogen or nitrogen/hydrogen as carrying gas, deposition temperature at 800 ℃, ratio of NH_3/HSiCl_3 at 4. The maximum deposition rate is 23.4 nm/min. The results show that the film is composed of mainly Si-N, and some Si-O, and the hardness of that is 2865HV." @default.
- W2378617704 created "2016-06-24" @default.
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- W2378617704 date "2006-01-01" @default.
- W2378617704 modified "2023-09-25" @default.
- W2378617704 title "Preparation and Property Investigation of CVD-Si_3N_4 Thin Film" @default.
- W2378617704 hasPublicationYear "2006" @default.
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