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• W2378617746 abstract "The metal organic chemical vapor deposition(MOCVD)of alumina films on Fe-Cr-Ni alloy was performed in nitrogen at atmospheric pressure.This paper studied the influencing factors of substrate temperature,ASB temperature and carrier gas flow on the deposition rate of Al2O3 film.The Al2O3 films were investigated by SEM and EDS.It was indicated that in the condition of 125 ℃ processing temperature,the thickness of film is 500μm and the bonding strength of film is twice as that of gradient layer(the gradient depositon of NiAl and Al2O3)." @default.
• W2378617746 created "2016-06-24" @default.
• W2378617746 creator A5079979964 @default.
• W2378617746 date "2007-01-01" @default.
• W2378617746 modified "2023-09-22" @default.
• W2378617746 title "Study on the Preparation of Al_2O_3 Film by MOCVD Under Normal Atmosphere" @default.
• W2378617746 hasPublicationYear "2007" @default.
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