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- W2378625612 abstract "The research of micro-forces between micro-parts forms the base for micro-machine (MEMS) development. According to the characteristics of the interactions between micro-parts in MEMS, three models were simplified. Based on these models, micro-forces between micro-parts were analyzed, and the analytical formulas were formulated. Factors which may affect the micro-forces, such as surface condition, media and constitutive material of micro-parts were discussed. A coefficient of surface roughness on micro-forces was introduced, which facilitated the analysis of the influence of surface roughness." @default.
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- W2378625612 date "2008-01-01" @default.
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- W2378625612 title "Analysis of micro-forces between micro-parts and their influence factors in MEMS" @default.
- W2378625612 hasPublicationYear "2008" @default.
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