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- W2379252576 abstract "Investigating the behavior of micro diffusers/nozzles was valuable for improving the performance of micro-valveless pumps and micro thrusters. Micro diffusers/nozzles were fabricated in silicon based on MEMS (micro-electro-mechanical systems) technology. The relationship between volume flow rate and inlet/outlet pressure difference of nitrogen were measured in the experiment. Several factors influencing on the flow characteristics were analyzed. It is found that the experimental values for diffuser flow are slightly higher than those for nozzle flow. With the increase of taper angle, the length and the width of straight microchannel, the flow performance is improved." @default.
- W2379252576 created "2016-06-24" @default.
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- W2379252576 date "2003-01-01" @default.
- W2379252576 modified "2023-09-27" @default.
- W2379252576 title "FABRICATION AND GAS FLOW CHARACTERISTICS ANALYSIS OF MICRO DIFFUSER/NOZZLES" @default.
- W2379252576 hasPublicationYear "2003" @default.
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