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- W2379478130 abstract "?LIGA and quasi-LIGA technologies used for high aspect ratio 3D micromachining were accelerated by the rise and wide applications in information society of MEMS(microelectromechanical systems) technology.LIGA and related technologies are presented,and the applications of these technologies are illustrated for examples." @default.
- W2379478130 created "2016-06-24" @default.
- W2379478130 creator A5076037753 @default.
- W2379478130 date "2003-01-01" @default.
- W2379478130 modified "2023-09-25" @default.
- W2379478130 title "Related technologies and applications of LIGA" @default.
- W2379478130 hasPublicationYear "2003" @default.
- W2379478130 type Work @default.
- W2379478130 sameAs 2379478130 @default.
- W2379478130 citedByCount "0" @default.
- W2379478130 crossrefType "journal-article" @default.
- W2379478130 hasAuthorship W2379478130A5076037753 @default.
- W2379478130 hasConcept C127413603 @default.
- W2379478130 hasConcept C136525101 @default.
- W2379478130 hasConcept C142724271 @default.
- W2379478130 hasConcept C145667562 @default.
- W2379478130 hasConcept C145695476 @default.
- W2379478130 hasConcept C171250308 @default.
- W2379478130 hasConcept C192562407 @default.
- W2379478130 hasConcept C204787440 @default.
- W2379478130 hasConcept C37977207 @default.
- W2379478130 hasConcept C41008148 @default.
- W2379478130 hasConcept C71924100 @default.
- W2379478130 hasConcept C78519656 @default.
- W2379478130 hasConceptScore W2379478130C127413603 @default.
- W2379478130 hasConceptScore W2379478130C136525101 @default.
- W2379478130 hasConceptScore W2379478130C142724271 @default.
- W2379478130 hasConceptScore W2379478130C145667562 @default.
- W2379478130 hasConceptScore W2379478130C145695476 @default.
- W2379478130 hasConceptScore W2379478130C171250308 @default.
- W2379478130 hasConceptScore W2379478130C192562407 @default.
- W2379478130 hasConceptScore W2379478130C204787440 @default.
- W2379478130 hasConceptScore W2379478130C37977207 @default.
- W2379478130 hasConceptScore W2379478130C41008148 @default.
- W2379478130 hasConceptScore W2379478130C71924100 @default.
- W2379478130 hasConceptScore W2379478130C78519656 @default.
- W2379478130 hasLocation W23794781301 @default.
- W2379478130 hasOpenAccess W2379478130 @default.
- W2379478130 hasPrimaryLocation W23794781301 @default.
- W2379478130 hasRelatedWork W1967767532 @default.
- W2379478130 hasRelatedWork W2001575447 @default.
- W2379478130 hasRelatedWork W2072048215 @default.
- W2379478130 hasRelatedWork W2091739652 @default.
- W2379478130 hasRelatedWork W2179559016 @default.
- W2379478130 hasRelatedWork W2312574664 @default.
- W2379478130 hasRelatedWork W2348768249 @default.
- W2379478130 hasRelatedWork W2355412838 @default.
- W2379478130 hasRelatedWork W2355622638 @default.
- W2379478130 hasRelatedWork W2355872573 @default.
- W2379478130 hasRelatedWork W2369729993 @default.
- W2379478130 hasRelatedWork W2380918258 @default.
- W2379478130 hasRelatedWork W2381816427 @default.
- W2379478130 hasRelatedWork W2382472005 @default.
- W2379478130 hasRelatedWork W2392226384 @default.
- W2379478130 hasRelatedWork W2490469217 @default.
- W2379478130 hasRelatedWork W3135334834 @default.
- W2379478130 hasRelatedWork W3211994514 @default.
- W2379478130 hasRelatedWork W582048977 @default.
- W2379478130 hasRelatedWork W631709279 @default.
- W2379478130 isParatext "false" @default.
- W2379478130 isRetracted "false" @default.
- W2379478130 magId "2379478130" @default.
- W2379478130 workType "article" @default.