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- W2379492783 abstract "MEMS is a relatively new field which is tied so closely with silicon processing that most of the early packaging technologies will most likely use ”off the shelf” packaging ”borrowed” from the semiconductor microelectronics field. In this paper, the present packaging types are first introduced, and then elaborated the CSP(chip scale package) which is the cost effective replacement for the traditional hermetic package, finally, some commercial packages for MEMS devices are given." @default.
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- W2379492783 date "2003-01-01" @default.
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- W2379492783 title "Study on packaging technology in MEMS" @default.
- W2379492783 hasPublicationYear "2003" @default.
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