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- W2379675212 abstract "Using plasma enhanced chemical vapor deposition (RF-PECVD) technique p-type μc-Si∶H thin films with the thickness of about 40nm are prepared on the glass substrate when B2H6 is used as dopant. For obtaining high dark conductivity of p-type μc-Si∶H thin films with high crystalline volume fraction,the major processing parameters of the substrate temperature,hydrogen dilution ratio and boron doping ratio are primarily optimized by the method of orthogonal test. The results of Raman spectrum and the conductivity measurement indicate that (1) within selected parameters,the substrate temperature is the most significant factor influencing the dark conductivity and crystalline volume fraction; the hydrogen dilution ratio is secondary,and the influence of the doping ratio is relatively weak. (2) using the optimized parameters,p-type μc-Si∶H thin films with the highest dark conductivity ～2.05S·cm-1 and crystalline volume fraction ～86% are obtained." @default.
- W2379675212 created "2016-06-24" @default.
- W2379675212 creator A5036291140 @default.
- W2379675212 date "2008-01-01" @default.
- W2379675212 modified "2023-09-26" @default.
- W2379675212 title "Preparation of High Conductivity p-type μc-Si∶H Thin Films with High Crystalline Volume Fraction" @default.
- W2379675212 hasPublicationYear "2008" @default.
- W2379675212 type Work @default.
- W2379675212 sameAs 2379675212 @default.
- W2379675212 citedByCount "0" @default.
- W2379675212 crossrefType "journal-article" @default.
- W2379675212 hasAuthorship W2379675212A5036291140 @default.
- W2379675212 hasConcept C111368507 @default.
- W2379675212 hasConcept C113196181 @default.
- W2379675212 hasConcept C119599485 @default.
- W2379675212 hasConcept C120665830 @default.
- W2379675212 hasConcept C121332964 @default.
- W2379675212 hasConcept C127313418 @default.
- W2379675212 hasConcept C127413603 @default.
- W2379675212 hasConcept C131540310 @default.
- W2379675212 hasConcept C147789679 @default.
- W2379675212 hasConcept C159985019 @default.
- W2379675212 hasConcept C171250308 @default.
- W2379675212 hasConcept C178790620 @default.
- W2379675212 hasConcept C185592680 @default.
- W2379675212 hasConcept C19067145 @default.
- W2379675212 hasConcept C191952053 @default.
- W2379675212 hasConcept C192562407 @default.
- W2379675212 hasConcept C20556612 @default.
- W2379675212 hasConcept C2777289219 @default.
- W2379675212 hasConcept C38347018 @default.
- W2379675212 hasConcept C40003534 @default.
- W2379675212 hasConcept C43617362 @default.
- W2379675212 hasConcept C49040817 @default.
- W2379675212 hasConcept C57410435 @default.
- W2379675212 hasConcept C57863236 @default.
- W2379675212 hasConcept C62520636 @default.
- W2379675212 hasConcept C65590680 @default.
- W2379675212 hasConcept C69990965 @default.
- W2379675212 hasConcept C71987851 @default.
- W2379675212 hasConcept C96618451 @default.
- W2379675212 hasConcept C97355855 @default.
- W2379675212 hasConceptScore W2379675212C111368507 @default.
- W2379675212 hasConceptScore W2379675212C113196181 @default.
- W2379675212 hasConceptScore W2379675212C119599485 @default.
- W2379675212 hasConceptScore W2379675212C120665830 @default.
- W2379675212 hasConceptScore W2379675212C121332964 @default.
- W2379675212 hasConceptScore W2379675212C127313418 @default.
- W2379675212 hasConceptScore W2379675212C127413603 @default.
- W2379675212 hasConceptScore W2379675212C131540310 @default.
- W2379675212 hasConceptScore W2379675212C147789679 @default.
- W2379675212 hasConceptScore W2379675212C159985019 @default.
- W2379675212 hasConceptScore W2379675212C171250308 @default.
- W2379675212 hasConceptScore W2379675212C178790620 @default.
- W2379675212 hasConceptScore W2379675212C185592680 @default.
- W2379675212 hasConceptScore W2379675212C19067145 @default.
- W2379675212 hasConceptScore W2379675212C191952053 @default.
- W2379675212 hasConceptScore W2379675212C192562407 @default.
- W2379675212 hasConceptScore W2379675212C20556612 @default.
- W2379675212 hasConceptScore W2379675212C2777289219 @default.
- W2379675212 hasConceptScore W2379675212C38347018 @default.
- W2379675212 hasConceptScore W2379675212C40003534 @default.
- W2379675212 hasConceptScore W2379675212C43617362 @default.
- W2379675212 hasConceptScore W2379675212C49040817 @default.
- W2379675212 hasConceptScore W2379675212C57410435 @default.
- W2379675212 hasConceptScore W2379675212C57863236 @default.
- W2379675212 hasConceptScore W2379675212C62520636 @default.
- W2379675212 hasConceptScore W2379675212C65590680 @default.
- W2379675212 hasConceptScore W2379675212C69990965 @default.
- W2379675212 hasConceptScore W2379675212C71987851 @default.
- W2379675212 hasConceptScore W2379675212C96618451 @default.
- W2379675212 hasConceptScore W2379675212C97355855 @default.
- W2379675212 hasLocation W23796752121 @default.
- W2379675212 hasOpenAccess W2379675212 @default.
- W2379675212 hasPrimaryLocation W23796752121 @default.
- W2379675212 hasRelatedWork W1519973576 @default.
- W2379675212 hasRelatedWork W1674722032 @default.
- W2379675212 hasRelatedWork W1773730200 @default.
- W2379675212 hasRelatedWork W1969506142 @default.
- W2379675212 hasRelatedWork W1982982486 @default.
- W2379675212 hasRelatedWork W1992022192 @default.
- W2379675212 hasRelatedWork W2000995526 @default.
- W2379675212 hasRelatedWork W2013522165 @default.
- W2379675212 hasRelatedWork W2019297315 @default.
- W2379675212 hasRelatedWork W2032488751 @default.
- W2379675212 hasRelatedWork W2058249651 @default.
- W2379675212 hasRelatedWork W2071147327 @default.
- W2379675212 hasRelatedWork W2075164424 @default.
- W2379675212 hasRelatedWork W2077745827 @default.
- W2379675212 hasRelatedWork W2356642184 @default.
- W2379675212 hasRelatedWork W2364752379 @default.
- W2379675212 hasRelatedWork W2376220072 @default.
- W2379675212 hasRelatedWork W2384439560 @default.
- W2379675212 hasRelatedWork W2391089350 @default.
- W2379675212 hasRelatedWork W3151757633 @default.
- W2379675212 isParatext "false" @default.
- W2379675212 isRetracted "false" @default.
- W2379675212 magId "2379675212" @default.
- W2379675212 workType "article" @default.