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- W2379822815 abstract "The measurement and analysis of error are of great importance for designing micro gears.However,in the domain of MEMS,there are no available references about the characteristics of error so far.A measuring method was designed by referring to the traditional scale up method for gears in watch and clock.By measuring the parameters like tip circle,root circle and tooth thickness,the actual machining errors were obtained.Statistics showed that the error directions of both micro gears and micro gears' hole were negative,and the errors of micro gears were much more than that of micro gears hole.The unilateral margin should be reserved more than 15 m when designing complicate hole and shaft." @default.
- W2379822815 created "2016-06-24" @default.
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- W2379822815 date "2010-01-01" @default.
- W2379822815 modified "2023-09-26" @default.
- W2379822815 title "Study on Micro-gears' Error of LIGA Processing" @default.
- W2379822815 hasPublicationYear "2010" @default.
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