Matches in SemOpenAlex for { <https://semopenalex.org/work/W2379980122> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2379980122 abstract "Electrostatically actuated circular microplates are widely used in MEMS(micro-electro-mechanical systems) devices such as micropumps and optical switches.All these devices exhibit an instability phenomenon known as pull-in instability,short circuit caused by pull-in with contact is destructive to micropump operation.To avoid pull-in instability caused by high driving voltage,pull-in voltage should be calculated accurately.1D lumped model,2D distributed model and 3D finite element model were proposed to simulate the deflection of micropump membrane subjected to nonlinear distributed electrostatic force.Hysteresis loop of micropump membrane,pull-in with contact and release were investigated comparatively by three models.Volume deformation of pump chamber,variation of pump membrane deflection and plate capacitance were also obtained.The 2D distributed model that is an ideally simplified model is more effective,pull-in voltage calculated by this model is in harmony with the results of 3D finite element model and macromodel,even when the membrane deformation is in the nonlinear elastic regime.The calculated pull-in voltage provides reference for setting the upper limit value of electrostatic micropump driving voltage." @default.
- W2379980122 created "2016-06-24" @default.
- W2379980122 creator A5064158929 @default.
- W2379980122 date "2011-01-01" @default.
- W2379980122 modified "2023-09-24" @default.
- W2379980122 title "RESEARCH ON PULL-IN AND RELEASE PHENOMENON OF ELECTROSTATIC MICROPUMPS" @default.
- W2379980122 hasPublicationYear "2011" @default.
- W2379980122 type Work @default.
- W2379980122 sameAs 2379980122 @default.
- W2379980122 citedByCount "0" @default.
- W2379980122 crossrefType "journal-article" @default.
- W2379980122 hasAuthorship W2379980122A5064158929 @default.
- W2379980122 hasConcept C119599485 @default.
- W2379980122 hasConcept C121332964 @default.
- W2379980122 hasConcept C127413603 @default.
- W2379980122 hasConcept C135628077 @default.
- W2379980122 hasConcept C158622935 @default.
- W2379980122 hasConcept C165801399 @default.
- W2379980122 hasConcept C17525397 @default.
- W2379980122 hasConcept C192562407 @default.
- W2379980122 hasConcept C207821765 @default.
- W2379980122 hasConcept C2781355719 @default.
- W2379980122 hasConcept C30066665 @default.
- W2379980122 hasConcept C37977207 @default.
- W2379980122 hasConcept C49040817 @default.
- W2379980122 hasConcept C57879066 @default.
- W2379980122 hasConcept C62520636 @default.
- W2379980122 hasConcept C66938386 @default.
- W2379980122 hasConcept C74650414 @default.
- W2379980122 hasConcept C76272257 @default.
- W2379980122 hasConcept C78519656 @default.
- W2379980122 hasConceptScore W2379980122C119599485 @default.
- W2379980122 hasConceptScore W2379980122C121332964 @default.
- W2379980122 hasConceptScore W2379980122C127413603 @default.
- W2379980122 hasConceptScore W2379980122C135628077 @default.
- W2379980122 hasConceptScore W2379980122C158622935 @default.
- W2379980122 hasConceptScore W2379980122C165801399 @default.
- W2379980122 hasConceptScore W2379980122C17525397 @default.
- W2379980122 hasConceptScore W2379980122C192562407 @default.
- W2379980122 hasConceptScore W2379980122C207821765 @default.
- W2379980122 hasConceptScore W2379980122C2781355719 @default.
- W2379980122 hasConceptScore W2379980122C30066665 @default.
- W2379980122 hasConceptScore W2379980122C37977207 @default.
- W2379980122 hasConceptScore W2379980122C49040817 @default.
- W2379980122 hasConceptScore W2379980122C57879066 @default.
- W2379980122 hasConceptScore W2379980122C62520636 @default.
- W2379980122 hasConceptScore W2379980122C66938386 @default.
- W2379980122 hasConceptScore W2379980122C74650414 @default.
- W2379980122 hasConceptScore W2379980122C76272257 @default.
- W2379980122 hasConceptScore W2379980122C78519656 @default.
- W2379980122 hasLocation W23799801221 @default.
- W2379980122 hasOpenAccess W2379980122 @default.
- W2379980122 hasPrimaryLocation W23799801221 @default.
- W2379980122 hasRelatedWork W1998193801 @default.
- W2379980122 hasRelatedWork W2019547796 @default.
- W2379980122 hasRelatedWork W2050556110 @default.
- W2379980122 hasRelatedWork W207122664 @default.
- W2379980122 hasRelatedWork W2075459088 @default.
- W2379980122 hasRelatedWork W2076116641 @default.
- W2379980122 hasRelatedWork W2098046948 @default.
- W2379980122 hasRelatedWork W2135422431 @default.
- W2379980122 hasRelatedWork W2216740006 @default.
- W2379980122 hasRelatedWork W2220529070 @default.
- W2379980122 hasRelatedWork W2309145090 @default.
- W2379980122 hasRelatedWork W2380912687 @default.
- W2379980122 hasRelatedWork W2770333340 @default.
- W2379980122 hasRelatedWork W2773586354 @default.
- W2379980122 hasRelatedWork W2775007542 @default.
- W2379980122 hasRelatedWork W2778510703 @default.
- W2379980122 hasRelatedWork W2883872943 @default.
- W2379980122 hasRelatedWork W3086154093 @default.
- W2379980122 hasRelatedWork W3119440455 @default.
- W2379980122 hasRelatedWork W3164411706 @default.
- W2379980122 isParatext "false" @default.
- W2379980122 isRetracted "false" @default.
- W2379980122 magId "2379980122" @default.
- W2379980122 workType "article" @default.