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- W2380359175 abstract "In accordance with the contradictions between the resolution and focal depth when the projection photolithographic imaging system has an enough large numerical aperture,the imaging contrast enhancement in projection photolithography with pupil filtering is studies in detail.The optimal filtering is designed according to the different mask patterns,The study results show that the pupil filtering can enhance the imaging resolution and focal depth of the projection photolithographic system in large scale.It is an effective method for improving imaging resolution." @default.
- W2380359175 created "2016-06-24" @default.
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- W2380359175 date "2001-01-01" @default.
- W2380359175 modified "2023-09-25" @default.
- W2380359175 title "A Study on Improving Imaging Resolution of Projection Photolithography with Pupil Filtering" @default.
- W2380359175 hasPublicationYear "2001" @default.
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