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- W2380989281 abstract "As the price of lithography mask has been rising,so lower the cost of the mask,and even maskless lithography technology with no expensive mask has become the key. Mask graphics formats such as DXF and GDSII cannot be directly used for maskless lithography machine,so it needs to extract the data of mask graphics. To understand the characteristics of mask graphics as DXF format,get and analyze the information of the mask graphics, it validates the correctness through the MATLAB simulation." @default.
- W2380989281 created "2016-06-24" @default.
- W2380989281 creator A5005521023 @default.
- W2380989281 date "2015-01-01" @default.
- W2380989281 modified "2023-09-23" @default.
- W2380989281 title "Graphics import of maskless lithography techniques" @default.
- W2380989281 hasPublicationYear "2015" @default.
- W2380989281 type Work @default.
- W2380989281 sameAs 2380989281 @default.
- W2380989281 citedByCount "0" @default.
- W2380989281 crossrefType "journal-article" @default.
- W2380989281 hasAuthorship W2380989281A5005521023 @default.
- W2380989281 hasConcept C121684516 @default.
- W2380989281 hasConcept C137905882 @default.
- W2380989281 hasConcept C171250308 @default.
- W2380989281 hasConcept C192562407 @default.
- W2380989281 hasConcept C200274948 @default.
- W2380989281 hasConcept C204223013 @default.
- W2380989281 hasConcept C21442007 @default.
- W2380989281 hasConcept C2779227376 @default.
- W2380989281 hasConcept C41008148 @default.
- W2380989281 hasConcept C49040817 @default.
- W2380989281 hasConcept C53524968 @default.
- W2380989281 hasConcept C77660652 @default.
- W2380989281 hasConceptScore W2380989281C121684516 @default.
- W2380989281 hasConceptScore W2380989281C137905882 @default.
- W2380989281 hasConceptScore W2380989281C171250308 @default.
- W2380989281 hasConceptScore W2380989281C192562407 @default.
- W2380989281 hasConceptScore W2380989281C200274948 @default.
- W2380989281 hasConceptScore W2380989281C204223013 @default.
- W2380989281 hasConceptScore W2380989281C21442007 @default.
- W2380989281 hasConceptScore W2380989281C2779227376 @default.
- W2380989281 hasConceptScore W2380989281C41008148 @default.
- W2380989281 hasConceptScore W2380989281C49040817 @default.
- W2380989281 hasConceptScore W2380989281C53524968 @default.
- W2380989281 hasConceptScore W2380989281C77660652 @default.
- W2380989281 hasLocation W23809892811 @default.
- W2380989281 hasOpenAccess W2380989281 @default.
- W2380989281 hasPrimaryLocation W23809892811 @default.
- W2380989281 hasRelatedWork W1756330760 @default.
- W2380989281 hasRelatedWork W1966164374 @default.
- W2380989281 hasRelatedWork W2014564366 @default.
- W2380989281 hasRelatedWork W2057756730 @default.
- W2380989281 hasRelatedWork W2062615249 @default.
- W2380989281 hasRelatedWork W2067637770 @default.
- W2380989281 hasRelatedWork W2085515053 @default.
- W2380989281 hasRelatedWork W2128764918 @default.
- W2380989281 hasRelatedWork W2193542521 @default.
- W2380989281 hasRelatedWork W2222813275 @default.
- W2380989281 hasRelatedWork W2299969795 @default.
- W2380989281 hasRelatedWork W2526809013 @default.
- W2380989281 hasRelatedWork W2538283491 @default.
- W2380989281 hasRelatedWork W2734947313 @default.
- W2380989281 hasRelatedWork W830241892 @default.
- W2380989281 hasRelatedWork W2848205054 @default.
- W2380989281 hasRelatedWork W2903145425 @default.
- W2380989281 hasRelatedWork W2935267157 @default.
- W2380989281 hasRelatedWork W2935519566 @default.
- W2380989281 hasRelatedWork W3168874418 @default.
- W2380989281 isParatext "false" @default.
- W2380989281 isRetracted "false" @default.
- W2380989281 magId "2380989281" @default.
- W2380989281 workType "article" @default.