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• W2381420757 abstract "Al2O3 particles were synthesized by solgel method with alumium isopropoxide as raw material, toluene as solvent and ammonia as regulator of pH. The analysis of XRD and TEM indicates that Al2O3 particles contain θ and α crystal phases, the Al2O3 particles are 10～20 nm in diameter and uniformly distributed, with the shape of sphere or like sphere. The analyses of BET and content of impurity results show that the specific surface of Al2O3 particles is 82.31 m2/g and purity of Al2O3 is more than 99.95%. The effect on the dispersion and stability of Al2O3 on the water in different conditions including pH, the kind of dispersant and dosage of dispersant were studied. The results show that stabilized Al2O3 CMP slurry can be obtained with 6% solid Al2O3, 10% H2O2 (mass fraction) as oxidant, 0.99% (volue fraction) amine isopropyl alcohol as dispersant and controlling the range of pH from 3 to 4." @default.
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• W2381420757 date "2003-01-01" @default.
• W2381420757 modified "2023-09-22" @default.
• W2381420757 title "Synthesis of Al_2O_3 nanoparticles and dispersion and stability for its suspension" @default.
• W2381420757 hasPublicationYear "2003" @default.
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