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- W2382388093 abstract "In order to accurately carry out the wavelength scan,it was proposed to calibrate the wavelength of monochromator.All components of the monochromator were laid on the Rowland circle.The position of the exit slit was changed to obtain the corresponding monochromatic light in the exit slit of the monochromator.Measuring the spectrum of the standard hollow cathode source with He gas,the wavelength of Mcpherson247 was detemined.The analysis of calibration results indicate that the calibration error of the monochromator is ±0.017nm～±0.097nm in 1～100nm." @default.
- W2382388093 created "2016-06-24" @default.
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- W2382388093 date "2007-01-01" @default.
- W2382388093 modified "2023-09-23" @default.
- W2382388093 title "Wavelength calibration of EUV and soft X-ray monochromator measured by hollow cathode source" @default.
- W2382388093 hasPublicationYear "2007" @default.
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