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- W2382605364 abstract "The mixture of CF_4 and Ar was used to simulate the waste gas of plasma etching.F was analyzed by emission spectrometry at 697.5nm and 739.5nm in the spectral range of 600—800nm in fluoride waste gas.The effects of the radio-frequency power of ICP discharge on the detection of F were studied.The detection limit decreases with the increasing radio-frequency power." @default.
- W2382605364 created "2016-06-24" @default.
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- W2382605364 date "2005-01-01" @default.
- W2382605364 modified "2023-09-23" @default.
- W2382605364 title "Application of Emission Spectrometry in Trace Fluorine Analysis of Flue Gas from Plasma Etching" @default.
- W2382605364 hasPublicationYear "2005" @default.
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