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- W2382655780 abstract "The errors of two-axis worktable measured by a ballbar transducer and linear grating sensors are studied simultaneously and their characteristics are analyzed. The results show that for the linear grating sensor the main error sources of the measurement are the meterage noise and the installation inclination, while for the ballbar transducer the main error source is the installation eccentricity. Though the single direction measurement precision of the linear grating sensors is high enough, the relative precision of the two axes of the worktable can' t be guaranteed by linear grating sensors. The error sources of the measuring system are analyzed and the system error model is established, with which the decoupling of the error measured by linear grating sensors and ballbar transducer is realized and an approach to reduce linear grating sensor errors and realize the high precision adjustment of the worktable is proposed." @default.
- W2382655780 created "2016-06-24" @default.
- W2382655780 creator A5054789478 @default.
- W2382655780 date "2005-01-01" @default.
- W2382655780 modified "2023-09-25" @default.
- W2382655780 title "Worktable Precision Adjustment Based on Error Analysis of Ballbar Transducer and Linear Grating Sensor" @default.
- W2382655780 hasPublicationYear "2005" @default.
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