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- W2382680263 abstract "The micro-spring force sensor which is applied to micro-tensile system for measuring mechanical properties of thin films is presented.The coefficient of elasticity of micro-spring force sensor is analyzed by Ansys,and micro-spring force sensor is fabricated by linear cutting and UV-LIGA(Ultraviolet Lithographie GalVanoformung Abformung)technology based on analyzed results.The force sensor is calibrated in the special device.The calibrated results show that the force sensor has good consistency with the Ansys result,and it indicates that the force sensor by SU-8 technology have good linearity with large deformation.So the micro-spring force sensor could assure the accuracy of tensile force in the micro-tensile system." @default.
- W2382680263 created "2016-06-24" @default.
- W2382680263 creator A5011517132 @default.
- W2382680263 date "2009-01-01" @default.
- W2382680263 modified "2023-09-25" @default.
- W2382680263 title "RESEARCH OF MICRO-SPRINGS FORCE SENSOR FOR MICRO-TENSILE SYSTEM" @default.
- W2382680263 hasPublicationYear "2009" @default.
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