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- W2382740968 abstract "Transparent conductive ZnO:Al(AZO)films were deposited on glass substrates by radical assisted magnetron sputtering.The effects of post-annealing in hydrogen atmosphere on the Al doping efficiency and properties of AZO films were investigated.It was found that post-annealing treatment improves the Al doping efficiency and reduces the concentration of neutral impurity scattering centers.These two factors together improve the conductivity of AZO films.The resistivity and the transmittance at 550nm of the AZO films annealed in H2at 550℃ were 6.5×10-4Ω·cm and 85.7%,respectively,with carrier concentration being 3.3×1020 cm-3 and mobility of 29.7cm2·V-1·s-1." @default.
- W2382740968 created "2016-06-24" @default.
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- W2382740968 date "2010-01-01" @default.
- W2382740968 modified "2023-09-25" @default.
- W2382740968 title "Effects of post-annealing in hydrogen atmosphere on the properties of Al-doped ZnO films" @default.
- W2382740968 hasPublicationYear "2010" @default.
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