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- W2382849449 abstract "Reactive magnetron sputtering (RMS) has been applied in the field of optical coating for many years.A lot of attention has been paid by optical coating manufacutures on RMS due to its function of enhancing the quality of optical thin films with lower cost.RMS is now entering industrial production. The paper describes some progress in RMS and shows a possible strategy for rebuild an old-version evaporation coater to a RMS plant." @default.
- W2382849449 created "2016-06-24" @default.
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- W2382849449 date "2004-01-01" @default.
- W2382849449 modified "2023-09-23" @default.
- W2382849449 title "Advances in reactive magnetron sputtering (RMS) applied on optical coating" @default.
- W2382849449 hasPublicationYear "2004" @default.
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