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- W2383028625 abstract "The paper introduces a detection experiment of the crystal defect.In combination with a detection of crystal defects causing chipinvalidation in production,the paper analyzes the type and the locations of crystal defects and gives a solution." @default.
- W2383028625 created "2016-06-24" @default.
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- W2383028625 date "2010-01-01" @default.
- W2383028625 modified "2023-09-23" @default.
- W2383028625 title "The Detection of Bullet-like Defect of Silicon Substrate in Semiconductor Process" @default.
- W2383028625 hasPublicationYear "2010" @default.
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