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- W2383052990 abstract "A MEMS surface resonant magnetometer based on Lorentz force was proposed. This magnetometer has a current carrier to sense the magnetic field and changes into deflection of beams which will be detected by the Comb-capacitance. It has a high sensitivity, simple structure and easy to manufacture. The mechanical model of the sensitive element was established. The equations of stiffness of the system, deflection, first-order resonance frequency and sensitivity were setup and simulated in ANSYS. It can be seen that the simulation results of deflection and first-order resonance frequency are in good accordance with the theoretical calculations, which proves the feasibility and the rationality of the theoretical model." @default.
- W2383052990 created "2016-06-24" @default.
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- W2383052990 date "2009-01-01" @default.
- W2383052990 modified "2023-09-24" @default.
- W2383052990 title "Modeling and Simulation of MEMS Surface Resonant Magnetometer" @default.
- W2383052990 hasPublicationYear "2009" @default.
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