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- W2383552336 abstract "a-Si1-XCX∶ HK films have been deposited by controlling H2 diluted and a ratio of CH4 in Si H4 +CH4 gas mixture with a new designed ultra high vacuum PECVD multicabinet system.With deposition conditions optimized the high quality amorphous silicon carbon films,having energy gap in wide band,have been obtained.The effect of H2 diluted has been investigated.A detailed analysis of properties of a- Si1-XCX∶ HK films has been carried out by RBS、ERDA、PDS、IR and Ramman spectroscopies." @default.
- W2383552336 created "2016-06-24" @default.
- W2383552336 creator A5050776007 @default.
- W2383552336 date "2000-01-01" @default.
- W2383552336 modified "2023-09-27" @default.
- W2383552336 title "a-Si_(1-X)C_X∶ H_KFilms Deposited with Ultra High Vacuum PECVD System and their Characterizations" @default.
- W2383552336 hasPublicationYear "2000" @default.
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