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- W2384108596 abstract "In the sinusoidal phase modulating(SPM) interferometer technology for surface profile measurement,the high speed charge coupled device(CCD) of frame frequency greater than 300 frame/s is necessary to detect the interference signals,and the relationship between CCD′s frame frequency and modulating frequency is needed to be integer multiple.A novel high-speed image sensing technique with adjustable frame rate based on an low speed CCD(frame frequency less than 30 frame/s) was proposed in this paper,which can be used to realize the surface profile measurement by the SPM interferometer.A high speed sensor was designed by controlling the number of pixels of every frame to improve the CCD frame rate,the frame rate is in the range of 300～1600 frame/s,and the frame size can continuously adjustable,which satisfies the sinusoidal phase modulation.The SPM interferometer with the CCD was used to measure the surface profile of glass plate,and the experiment results of the measurement accuracy under different frame rates were compared.When the frame rates are 16,8,4 times of the modulating signal,arithmetical mean deviation of the glass plate surface profile is less than 1.8 nm,and repeatability of the accuracy is superior to 3 nm." @default.
- W2384108596 created "2016-06-24" @default.
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- W2384108596 date "2007-01-01" @default.
- W2384108596 modified "2023-09-24" @default.
- W2384108596 title "Sinusoidal Phase Modulating Interferometry Based on Low Frame Rate Area Array CCD" @default.
- W2384108596 hasPublicationYear "2007" @default.
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