Matches in SemOpenAlex for { <https://semopenalex.org/work/W2384115931> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2384115931 abstract "The preparation method of the free-handing film in MEMS is one of the key technologies of micro structure preparation.This article focuses on the mechanical sensitivity of peripheral fixed supported square film and introduces how to fabricate highly sensitive free-handing film by adopting the deep boron-diffusion self-stopped etching technique.The experiment shows that when the silicon was diffused for 3 h at a temperature of 1 175 ℃ and then,after removing the borosilicate glass covering it,was etched in TMAH for 7.5 h,an even free-handing film which is 3 μm in thickness,5 mm in length and 1.12 Ω/sq in sheet resistance was fabricated.The article provides a detailed introduction to the preparation method of the free-handing film and proposes some feasible solutions to solve the problem of borosilicate glass that appears during the process of diffusion." @default.
- W2384115931 created "2016-06-24" @default.
- W2384115931 creator A5029060433 @default.
- W2384115931 date "2012-01-01" @default.
- W2384115931 modified "2023-09-26" @default.
- W2384115931 title "Research on the Preparation Method of Free-handing Conductive Membrane with High Mechanical Sensitivity" @default.
- W2384115931 hasPublicationYear "2012" @default.
- W2384115931 type Work @default.
- W2384115931 sameAs 2384115931 @default.
- W2384115931 citedByCount "0" @default.
- W2384115931 crossrefType "journal-article" @default.
- W2384115931 hasAuthorship W2384115931A5029060433 @default.
- W2384115931 hasConcept C100460472 @default.
- W2384115931 hasConcept C121332964 @default.
- W2384115931 hasConcept C127413603 @default.
- W2384115931 hasConcept C159985019 @default.
- W2384115931 hasConcept C178790620 @default.
- W2384115931 hasConcept C185592680 @default.
- W2384115931 hasConcept C192562407 @default.
- W2384115931 hasConcept C202374169 @default.
- W2384115931 hasConcept C206802598 @default.
- W2384115931 hasConcept C21200559 @default.
- W2384115931 hasConcept C24326235 @default.
- W2384115931 hasConcept C2779227376 @default.
- W2384115931 hasConcept C37977207 @default.
- W2384115931 hasConcept C41625074 @default.
- W2384115931 hasConcept C49040817 @default.
- W2384115931 hasConcept C501308230 @default.
- W2384115931 hasConcept C54355233 @default.
- W2384115931 hasConcept C544956773 @default.
- W2384115931 hasConcept C66825105 @default.
- W2384115931 hasConcept C69357855 @default.
- W2384115931 hasConcept C86803240 @default.
- W2384115931 hasConcept C97355855 @default.
- W2384115931 hasConceptScore W2384115931C100460472 @default.
- W2384115931 hasConceptScore W2384115931C121332964 @default.
- W2384115931 hasConceptScore W2384115931C127413603 @default.
- W2384115931 hasConceptScore W2384115931C159985019 @default.
- W2384115931 hasConceptScore W2384115931C178790620 @default.
- W2384115931 hasConceptScore W2384115931C185592680 @default.
- W2384115931 hasConceptScore W2384115931C192562407 @default.
- W2384115931 hasConceptScore W2384115931C202374169 @default.
- W2384115931 hasConceptScore W2384115931C206802598 @default.
- W2384115931 hasConceptScore W2384115931C21200559 @default.
- W2384115931 hasConceptScore W2384115931C24326235 @default.
- W2384115931 hasConceptScore W2384115931C2779227376 @default.
- W2384115931 hasConceptScore W2384115931C37977207 @default.
- W2384115931 hasConceptScore W2384115931C41625074 @default.
- W2384115931 hasConceptScore W2384115931C49040817 @default.
- W2384115931 hasConceptScore W2384115931C501308230 @default.
- W2384115931 hasConceptScore W2384115931C54355233 @default.
- W2384115931 hasConceptScore W2384115931C544956773 @default.
- W2384115931 hasConceptScore W2384115931C66825105 @default.
- W2384115931 hasConceptScore W2384115931C69357855 @default.
- W2384115931 hasConceptScore W2384115931C86803240 @default.
- W2384115931 hasConceptScore W2384115931C97355855 @default.
- W2384115931 hasLocation W23841159311 @default.
- W2384115931 hasOpenAccess W2384115931 @default.
- W2384115931 hasPrimaryLocation W23841159311 @default.
- W2384115931 hasRelatedWork W2002141302 @default.
- W2384115931 hasRelatedWork W2004544528 @default.
- W2384115931 hasRelatedWork W2012870271 @default.
- W2384115931 hasRelatedWork W2020984046 @default.
- W2384115931 hasRelatedWork W2027606218 @default.
- W2384115931 hasRelatedWork W2034390909 @default.
- W2384115931 hasRelatedWork W2035951697 @default.
- W2384115931 hasRelatedWork W2037432385 @default.
- W2384115931 hasRelatedWork W2117087358 @default.
- W2384115931 hasRelatedWork W2135752425 @default.
- W2384115931 hasRelatedWork W2137344414 @default.
- W2384115931 hasRelatedWork W2142967648 @default.
- W2384115931 hasRelatedWork W2146628146 @default.
- W2384115931 hasRelatedWork W2273657440 @default.
- W2384115931 hasRelatedWork W2384749951 @default.
- W2384115931 hasRelatedWork W2385808959 @default.
- W2384115931 hasRelatedWork W2728875496 @default.
- W2384115931 hasRelatedWork W2800133485 @default.
- W2384115931 hasRelatedWork W2827427381 @default.
- W2384115931 hasRelatedWork W2848470174 @default.
- W2384115931 isParatext "false" @default.
- W2384115931 isRetracted "false" @default.
- W2384115931 magId "2384115931" @default.
- W2384115931 workType "article" @default.