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- W2384153231 abstract "The photolithography parameters of Acoustic-Optic Tunable Filter(AOTF)using the LiN_bO_3 are studied.The rotation rate of spin coater,exposure time and develop time which are effective on the pho- tolithography are mainly discussed.After many experiments,we got better photolithography parameters as fol- low:the rotation rate of spin coater is 2850/8(rpm/s)in low speed and 6000/25(rpm/s)in high speed.The prebake temperature is 90℃and postbake temperature is 100℃.Both of their times are 30 minutes.The ex- posure and develop time are 10 seconds.With these parameters,better photolithography graphics are obtained. Observing through microscope,the photolithography graphics is lustration with smooth side edge." @default.
- W2384153231 created "2016-06-24" @default.
- W2384153231 creator A5022519723 @default.
- W2384153231 date "2007-01-01" @default.
- W2384153231 modified "2023-09-25" @default.
- W2384153231 title "Study on Photolithography of AOTF" @default.
- W2384153231 hasPublicationYear "2007" @default.
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