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- W2384202568 abstract "According to the conflicts among overshoot restraint,positioning precision and stability of normal PID controller in nano-scale motion control,the adaptive fuzzy PID controller is applied to the nano-scale pricision motion system.Base on the characters of nano-scale motion control and a group of PID parameters from a mass of practical tuning,a set of fuzzy sets,fuzzy rules and fuzzy domain are proposed.The experiment result shows that the controller is effective to improve the dynamic performance and restrain the overshoot,and the controller has good robust stability and successfully improve the positioning precision to ±10 nm.And it is proved that the fuzzy PID controller and fuzzy rules building mentioned are effective and feasible." @default.
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- W2384202568 date "2011-01-01" @default.
- W2384202568 modified "2023-09-23" @default.
- W2384202568 title "Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System" @default.
- W2384202568 hasPublicationYear "2011" @default.
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