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- W2384234749 abstract "This paper introduces newest version about integrated process modeling system TSUPREM-4 and many simulation application examples in the gate oxidation process impurity segregate effect.The quantitative analysis of impurity segregate effect were completed." @default.
- W2384234749 created "2016-06-24" @default.
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- W2384234749 date "2002-01-01" @default.
- W2384234749 modified "2023-09-26" @default.
- W2384234749 title "TSUPREM-4 2D IC process modeling system and application" @default.
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