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- W2384300533 abstract "Some new technologies of micro-mechanism manufacture are discussed, such as microfabrication technology for surface/bulk, LIGA and silicon direct bonding technologies and so on. Besides, the application foreground in MEMS products using these new technologies is also expounded." @default.
- W2384300533 created "2016-06-24" @default.
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- W2384300533 date "2005-01-01" @default.
- W2384300533 modified "2023-09-26" @default.
- W2384300533 title "Manufacturing Technologies for MEMS at Micro/Nanometer Level" @default.
- W2384300533 hasPublicationYear "2005" @default.
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