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- W2384312512 abstract "Aluminum oxide-doped zinc oxide(AZO) thin films were prepared on glass substrates by radio frequency(RF) magnetron sputtering.High purity(99.9%) metallic ZnO:Al2O3(w(ZnO)=98%,w(Al2O3)=2%) ceramic target was used as source material.The morphological structure and photoelectric properties of prepared AZO films were measured by X-ray diffractometer(XRD),scanning electron micro-scope(SEM) and ultraviolet-visible(UV-Vis) spectrophotometer,the effects of substrate temperature on prepared AZO films were analyzed from the angles of film growth mode and defect scattering.The results show that the properties of the AZO thin films are remarkably influenced by the substrate temperature when the substrate temperatures are in the range of room temperature to 300 ℃.The film prepared at the substrate temperature of 200 ℃ possesses a lowest resistivity of 2.67×10–3 Ω·cm and an average transmittance of over 85% in visible range." @default.
- W2384312512 created "2016-06-24" @default.
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- W2384312512 date "2011-01-01" @default.
- W2384312512 modified "2023-09-23" @default.
- W2384312512 title "Influence of substrate temperature on performance of Al_2O_3-doped ZnO transparent conductive thin films" @default.
- W2384312512 hasPublicationYear "2011" @default.
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