Matches in SemOpenAlex for { <https://semopenalex.org/work/W2384656722> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2384656722 abstract "Concerning the development history of MEMS technology, the present paper introduces a state of the art developing direction of silicon based MEMS machining, indicating that there are two main developing directions. One is sacrificial layers technology, and the other is bulk micromachining. Sacrificial layers technology is developing towards multiple layers and integration. Bulk micromachining mainly includes combination of bonding and deep etching, pursuit to big mass and small stress, and three dimensional fabrications technology which is the developing direction of new body silicon technology. Standard process fabrication is becoming more and more important for MEMS study." @default.
- W2384656722 created "2016-06-24" @default.
- W2384656722 creator A5074264859 @default.
- W2384656722 date "2001-01-01" @default.
- W2384656722 modified "2023-09-25" @default.
- W2384656722 title "TECHNOLOGY OF SILICON-BASED MEMS" @default.
- W2384656722 hasPublicationYear "2001" @default.
- W2384656722 type Work @default.
- W2384656722 sameAs 2384656722 @default.
- W2384656722 citedByCount "1" @default.
- W2384656722 crossrefType "journal-article" @default.
- W2384656722 hasAuthorship W2384656722A5074264859 @default.
- W2384656722 hasConcept C100460472 @default.
- W2384656722 hasConcept C127413603 @default.
- W2384656722 hasConcept C136525101 @default.
- W2384656722 hasConcept C142724271 @default.
- W2384656722 hasConcept C145667562 @default.
- W2384656722 hasConcept C171250308 @default.
- W2384656722 hasConcept C191897082 @default.
- W2384656722 hasConcept C192562407 @default.
- W2384656722 hasConcept C204787440 @default.
- W2384656722 hasConcept C2779227376 @default.
- W2384656722 hasConcept C37977207 @default.
- W2384656722 hasConcept C41075158 @default.
- W2384656722 hasConcept C49040817 @default.
- W2384656722 hasConcept C523214423 @default.
- W2384656722 hasConcept C544956773 @default.
- W2384656722 hasConcept C71924100 @default.
- W2384656722 hasConcept C78519656 @default.
- W2384656722 hasConceptScore W2384656722C100460472 @default.
- W2384656722 hasConceptScore W2384656722C127413603 @default.
- W2384656722 hasConceptScore W2384656722C136525101 @default.
- W2384656722 hasConceptScore W2384656722C142724271 @default.
- W2384656722 hasConceptScore W2384656722C145667562 @default.
- W2384656722 hasConceptScore W2384656722C171250308 @default.
- W2384656722 hasConceptScore W2384656722C191897082 @default.
- W2384656722 hasConceptScore W2384656722C192562407 @default.
- W2384656722 hasConceptScore W2384656722C204787440 @default.
- W2384656722 hasConceptScore W2384656722C2779227376 @default.
- W2384656722 hasConceptScore W2384656722C37977207 @default.
- W2384656722 hasConceptScore W2384656722C41075158 @default.
- W2384656722 hasConceptScore W2384656722C49040817 @default.
- W2384656722 hasConceptScore W2384656722C523214423 @default.
- W2384656722 hasConceptScore W2384656722C544956773 @default.
- W2384656722 hasConceptScore W2384656722C71924100 @default.
- W2384656722 hasConceptScore W2384656722C78519656 @default.
- W2384656722 hasLocation W23846567221 @default.
- W2384656722 hasOpenAccess W2384656722 @default.
- W2384656722 hasPrimaryLocation W23846567221 @default.
- W2384656722 hasRelatedWork W150021347 @default.
- W2384656722 hasRelatedWork W1903530974 @default.
- W2384656722 hasRelatedWork W2006688487 @default.
- W2384656722 hasRelatedWork W2071703708 @default.
- W2384656722 hasRelatedWork W2075424570 @default.
- W2384656722 hasRelatedWork W2101575235 @default.
- W2384656722 hasRelatedWork W2134177552 @default.
- W2384656722 hasRelatedWork W2168174474 @default.
- W2384656722 hasRelatedWork W2169258629 @default.
- W2384656722 hasRelatedWork W2273688170 @default.
- W2384656722 hasRelatedWork W2274350559 @default.
- W2384656722 hasRelatedWork W2347322035 @default.
- W2384656722 hasRelatedWork W2392496860 @default.
- W2384656722 hasRelatedWork W2502692945 @default.
- W2384656722 hasRelatedWork W2743708553 @default.
- W2384656722 hasRelatedWork W2982508826 @default.
- W2384656722 hasRelatedWork W3021553204 @default.
- W2384656722 hasRelatedWork W3023313076 @default.
- W2384656722 hasRelatedWork W341342677 @default.
- W2384656722 hasRelatedWork W2164011706 @default.
- W2384656722 isParatext "false" @default.
- W2384656722 isRetracted "false" @default.
- W2384656722 magId "2384656722" @default.
- W2384656722 workType "article" @default.