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- W2384719462 abstract "For improving the sensitivity of the micro-Newton level force sensor,the properties of the microforce sensors with PT seeding layer and without PT seeding layer piezoelectric PZT thin film were compared.The PZT and PT/PZT/PT thin films were fabricated using sol-gel method and investigated using X-ray diffraction;the leakage current property of them was measured.The result shows that the two kinds of thin film had perovskite tetragonal structure and the PT/PZT/PT thin film strongly oriented in pervoskite(100)at the same 600℃ anneal temperature.As the applied voltage increases,the leakage current of the PZT thin film remained basically unchanged,the leakage current of the PT/PZT/PT thin film was retained about 1nA.The microforce sensors based on the PZT,PT/PZT/PT thin films with microcantilever structure were fabricated using MEMS technics at last.The sensing properties of microforce sensor were measured in static state and in quasi-static state.The result showed that their spring coefficients had change little whether the PT seeding layer was appended or not,but the sensitivities were increased when the PT seeding layer was appended." @default.
- W2384719462 created "2016-06-24" @default.
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- W2384719462 date "2008-01-01" @default.
- W2384719462 modified "2023-09-23" @default.
- W2384719462 title "Influence of the PT Seeding Layer to the Properties of the Microforce Sensor" @default.
- W2384719462 hasPublicationYear "2008" @default.
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