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- W2384865314 abstract "Transient temperature field of GaN material irradiated by pulse laser with different energy density was simulated and analyzed for Al_2O_3/GaN laser lift-off technique using the finite element method(FEM).Al_2O_3/GaN lift-off experiment has also been carried out using 248-nm KrF excimer laser.The simulated results using FEM were consistent well with experiment results.It was found that for the certain laser source,the temperature varied quickly with time and depth in GaN material,and the energy density of pulse laser should be no less than the threshold energy density in order to realize lift-off successfully and no more than the maximum value for avoiding damage caused by too high temperature.During multi-pulse laser processing,another key parameter was pulse frequency,whose variation range was calculated as the function of the energy density of laser." @default.
- W2384865314 created "2016-06-24" @default.
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- W2384865314 date "2005-01-01" @default.
- W2384865314 modified "2023-09-26" @default.
- W2384865314 title "Transient Temperature Field Study of GaN Material in Laser Lift-off Technique Based on Finite Element Method" @default.
- W2384865314 hasPublicationYear "2005" @default.
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