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- W2384961434 abstract "Finite element model of three dimensional flow field of EACVD system was established based on its actual geometric characteristics and process parameters.The effect of the swing period,the substrate temperature,the filament parameters and the air inlet parameters on uniformity of flow field on the substrate surface were studied.The results show that the change of the swing period makes no difference to the distribution of flow field on the substrate surface while the substrate swings slowly.The substrate temperature,the filament parameters and the air inlet parameters influence flow field on the substrate surface to some extent.Among these factors,the filament array mode and the gas flux of the air inlet are of most influential.The simulation carried out by adopting a group of optimized deposition parameters shows that the uniform flow field can be obtained with optimized deposition parameters.The simulation results may offer theoretical foundation to the preparation of high quality diamonds." @default.
- W2384961434 created "2016-06-24" @default.
- W2384961434 creator A5033436760 @default.
- W2384961434 date "2010-01-01" @default.
- W2384961434 modified "2023-09-24" @default.
- W2384961434 title "Study on the Space Flow Field of EACVD Swing Substrate by Finite Element Simulation" @default.
- W2384961434 hasPublicationYear "2010" @default.
- W2384961434 type Work @default.
- W2384961434 sameAs 2384961434 @default.
- W2384961434 citedByCount "0" @default.
- W2384961434 crossrefType "journal-article" @default.
- W2384961434 hasAuthorship W2384961434A5033436760 @default.
- W2384961434 hasConcept C111368507 @default.
- W2384961434 hasConcept C121332964 @default.
- W2384961434 hasConcept C127313418 @default.
- W2384961434 hasConcept C127413603 @default.
- W2384961434 hasConcept C135628077 @default.
- W2384961434 hasConcept C151730666 @default.
- W2384961434 hasConcept C191897082 @default.
- W2384961434 hasConcept C192562407 @default.
- W2384961434 hasConcept C201289731 @default.
- W2384961434 hasConcept C202444582 @default.
- W2384961434 hasConcept C2777289219 @default.
- W2384961434 hasConcept C2816523 @default.
- W2384961434 hasConcept C33923547 @default.
- W2384961434 hasConcept C38349280 @default.
- W2384961434 hasConcept C57879066 @default.
- W2384961434 hasConcept C64297162 @default.
- W2384961434 hasConcept C65655974 @default.
- W2384961434 hasConcept C68709404 @default.
- W2384961434 hasConcept C78519656 @default.
- W2384961434 hasConcept C9652623 @default.
- W2384961434 hasConcept C97355855 @default.
- W2384961434 hasConceptScore W2384961434C111368507 @default.
- W2384961434 hasConceptScore W2384961434C121332964 @default.
- W2384961434 hasConceptScore W2384961434C127313418 @default.
- W2384961434 hasConceptScore W2384961434C127413603 @default.
- W2384961434 hasConceptScore W2384961434C135628077 @default.
- W2384961434 hasConceptScore W2384961434C151730666 @default.
- W2384961434 hasConceptScore W2384961434C191897082 @default.
- W2384961434 hasConceptScore W2384961434C192562407 @default.
- W2384961434 hasConceptScore W2384961434C201289731 @default.
- W2384961434 hasConceptScore W2384961434C202444582 @default.
- W2384961434 hasConceptScore W2384961434C2777289219 @default.
- W2384961434 hasConceptScore W2384961434C2816523 @default.
- W2384961434 hasConceptScore W2384961434C33923547 @default.
- W2384961434 hasConceptScore W2384961434C38349280 @default.
- W2384961434 hasConceptScore W2384961434C57879066 @default.
- W2384961434 hasConceptScore W2384961434C64297162 @default.
- W2384961434 hasConceptScore W2384961434C65655974 @default.
- W2384961434 hasConceptScore W2384961434C68709404 @default.
- W2384961434 hasConceptScore W2384961434C78519656 @default.
- W2384961434 hasConceptScore W2384961434C9652623 @default.
- W2384961434 hasConceptScore W2384961434C97355855 @default.
- W2384961434 hasLocation W23849614341 @default.
- W2384961434 hasOpenAccess W2384961434 @default.
- W2384961434 hasPrimaryLocation W23849614341 @default.
- W2384961434 hasRelatedWork W1977259421 @default.
- W2384961434 hasRelatedWork W1990658555 @default.
- W2384961434 hasRelatedWork W2005935225 @default.
- W2384961434 hasRelatedWork W2027066842 @default.
- W2384961434 hasRelatedWork W2036865553 @default.
- W2384961434 hasRelatedWork W2054775630 @default.
- W2384961434 hasRelatedWork W2058103760 @default.
- W2384961434 hasRelatedWork W2074829406 @default.
- W2384961434 hasRelatedWork W2102311983 @default.
- W2384961434 hasRelatedWork W2339317048 @default.
- W2384961434 hasRelatedWork W2347818224 @default.
- W2384961434 hasRelatedWork W2358827226 @default.
- W2384961434 hasRelatedWork W2382429301 @default.
- W2384961434 hasRelatedWork W2384072940 @default.
- W2384961434 hasRelatedWork W2386367884 @default.
- W2384961434 hasRelatedWork W2621013357 @default.
- W2384961434 hasRelatedWork W2896795896 @default.
- W2384961434 hasRelatedWork W3047997480 @default.
- W2384961434 hasRelatedWork W3146916046 @default.
- W2384961434 hasRelatedWork W3164222647 @default.
- W2384961434 isParatext "false" @default.
- W2384961434 isRetracted "false" @default.
- W2384961434 magId "2384961434" @default.
- W2384961434 workType "article" @default.