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- W2385220360 abstract "A micro-heating technology based on electron beam lithography was presented.By studying the absorbed energy density of samples,the micro-heating effects of electron beam lithography on the surfaces of lead,bismuth,tin and aluminum films at 30 keV and on the surfaces of S1805 resist microstructures at 15 keV were experimentally investigated using FEI820 Dual Beam FIB/SEM workstation.The results show that the surfaces were melted when electron beam doses were high enough.This phenomenon suggests that the micro-area surface temperature of metal can be raised to its melting point or phase transition point via electron beam lithography,which is potentially a new technique for micro/nano-area material surface heating and preparation of microstructures with smooth curved surfaces." @default.
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- W2385220360 date "2011-01-01" @default.
- W2385220360 modified "2023-09-23" @default.
- W2385220360 title "Micro-Heating Technology Based on Electron Beam Lithography" @default.
- W2385220360 hasPublicationYear "2011" @default.
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