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- W2385221978 abstract "Scanning near-field optical microscopy(SNOM), based on the formation and detection of non-propagating wave, is capable of optical imaging with the resolution far beyond the diffraction limit of conventional far-field optics. But the non-linearity of PZT scanner in SNOM always infects the image quality for the precision required in nano-meter scale. The linearity and dynamic performance of the composite PZT scanner are dramatically enhanced. Based on the displacement-voltage curves of PZT scanner, which are obtained from experiments, a new method used to correct the nonlinearity of PZT scanner is proposed. The coefficient of linear fit of the test result is raised from 0.99 to 0.999 9 by using this method. The experiment results reveal the quality of optic image obtained by SNOM can be improved obviously after non-linearity correction." @default.
- W2385221978 created "2016-06-24" @default.
- W2385221978 creator A5064753974 @default.
- W2385221978 date "2004-01-01" @default.
- W2385221978 modified "2023-09-22" @default.
- W2385221978 title "Measurement and Correction for Scanning Non-linearity of PZT in SNOM" @default.
- W2385221978 hasPublicationYear "2004" @default.
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