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- W2386125402 abstract "The essay introduces the basic concept of MEMS and its constrcture as well as well as notable devices such as sensor, acutuator with detailed analysis. Issuing questions existed between micro systems,and summarized MEMS future application." @default.
- W2386125402 created "2016-06-24" @default.
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- W2386125402 date "2004-01-01" @default.
- W2386125402 modified "2023-09-26" @default.
- W2386125402 title "A Probe on Micro Electro Mechanical System" @default.
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