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- W2386303419 abstract "Femtosecond laser microfabrication is a new processing method combining such technologies as ultra-fast laser, CAD/CAM and photochemical material etc, for fabricating micro devices by means of layer-by-layer writing. In making a good micro device, the overlapping degree is a key parameter aside from the resolution. Thus the effect of different overlapping degrees on the quality of surfaces was studied. Theoretical emulation was also performed based on the free-radical theory and the equivalent exposition principle. In the experiments, an 80 fs pulsewidth and 800 nm wavelength femtosecond laser, mode locked at 80 MHz repetition rate, was used as the two-photon irradiation source. The laser beam was focused by a high numerical aperture (NA=1.25) oil immersion objective lens. Sample scanning was realized by a piezostage. The photopolymer material consisted of radical initiators, urethane acrylate monomer and oligomers. Different overlapping degrees with the paces of 0.1, 0.2, 0.3 and 0.4 μm were used to get different surfaces. After measuring and analyzing the surface roughness, the most suitable overlapping degree was found for a high-quality micro device fabrication." @default.
- W2386303419 created "2016-06-24" @default.
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- W2386303419 date "2008-01-01" @default.
- W2386303419 modified "2023-09-25" @default.
- W2386303419 title "Effect of overlapping degree on surface roughness in two photon micro fabrication" @default.
- W2386303419 hasPublicationYear "2008" @default.
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