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- W2386688911 abstract "The promotion of efficiency of transporting system is significant to the Semiconductor Wafer Fabrication System(SWFS).To reduce the average traveling time,the average waiting time,and blockages in the Interbay system,this paper proposes a new real-time method using Hungarian algorithm.Simulation results based on data of 300 mm wafer fabrication systems show that this method outperforms the traditional schedule approaches in term of overall efficiency and performance of Interbay material handling system." @default.
- W2386688911 created "2016-06-24" @default.
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- W2386688911 date "2011-01-01" @default.
- W2386688911 modified "2023-09-23" @default.
- W2386688911 title "Real-time Schedule Approach for Material Handling System of Wafer Fabrication" @default.
- W2386688911 hasPublicationYear "2011" @default.
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