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- W2386760456 abstract "SiO2 deposited by TEOS-O2-N2 system is very important in the high-power VDMOS production.Mostly introduce deposition system of TEOS-O2-N2.Process parameters was built over a very large number of trials about deposition system of TEOS-O2-N2and SiO2deposited by TEOS-O2-N2system is applied in the VDMOS development and manufacture and the results are satisfactory." @default.
- W2386760456 created "2016-06-24" @default.
- W2386760456 creator A5074987782 @default.
- W2386760456 date "2012-01-01" @default.
- W2386760456 modified "2023-09-25" @default.
- W2386760456 title "Research of Deposition SiO_2 Process Based on TEOS-O_2-N_2" @default.
- W2386760456 hasPublicationYear "2012" @default.
- W2386760456 type Work @default.
- W2386760456 sameAs 2386760456 @default.
- W2386760456 citedByCount "0" @default.
- W2386760456 crossrefType "journal-article" @default.
- W2386760456 hasAuthorship W2386760456A5074987782 @default.
- W2386760456 hasConcept C111919701 @default.
- W2386760456 hasConcept C127313418 @default.
- W2386760456 hasConcept C127413603 @default.
- W2386760456 hasConcept C151730666 @default.
- W2386760456 hasConcept C171250308 @default.
- W2386760456 hasConcept C191897082 @default.
- W2386760456 hasConcept C192562407 @default.
- W2386760456 hasConcept C21880701 @default.
- W2386760456 hasConcept C2816523 @default.
- W2386760456 hasConcept C41008148 @default.
- W2386760456 hasConcept C42360764 @default.
- W2386760456 hasConcept C64297162 @default.
- W2386760456 hasConcept C98045186 @default.
- W2386760456 hasConceptScore W2386760456C111919701 @default.
- W2386760456 hasConceptScore W2386760456C127313418 @default.
- W2386760456 hasConceptScore W2386760456C127413603 @default.
- W2386760456 hasConceptScore W2386760456C151730666 @default.
- W2386760456 hasConceptScore W2386760456C171250308 @default.
- W2386760456 hasConceptScore W2386760456C191897082 @default.
- W2386760456 hasConceptScore W2386760456C192562407 @default.
- W2386760456 hasConceptScore W2386760456C21880701 @default.
- W2386760456 hasConceptScore W2386760456C2816523 @default.
- W2386760456 hasConceptScore W2386760456C41008148 @default.
- W2386760456 hasConceptScore W2386760456C42360764 @default.
- W2386760456 hasConceptScore W2386760456C64297162 @default.
- W2386760456 hasConceptScore W2386760456C98045186 @default.
- W2386760456 hasLocation W23867604561 @default.
- W2386760456 hasOpenAccess W2386760456 @default.
- W2386760456 hasPrimaryLocation W23867604561 @default.
- W2386760456 hasRelatedWork W1636269824 @default.
- W2386760456 hasRelatedWork W1979961045 @default.
- W2386760456 hasRelatedWork W1997188101 @default.
- W2386760456 hasRelatedWork W2016127836 @default.
- W2386760456 hasRelatedWork W2023988157 @default.
- W2386760456 hasRelatedWork W2040411074 @default.
- W2386760456 hasRelatedWork W2051413208 @default.
- W2386760456 hasRelatedWork W2063301821 @default.
- W2386760456 hasRelatedWork W2064089641 @default.
- W2386760456 hasRelatedWork W2082699083 @default.
- W2386760456 hasRelatedWork W2152555025 @default.
- W2386760456 hasRelatedWork W2153034312 @default.
- W2386760456 hasRelatedWork W2316423177 @default.
- W2386760456 hasRelatedWork W2324070973 @default.
- W2386760456 hasRelatedWork W2609930621 @default.
- W2386760456 hasRelatedWork W2612735426 @default.
- W2386760456 hasRelatedWork W2942548552 @default.
- W2386760456 hasRelatedWork W3025876714 @default.
- W2386760456 hasRelatedWork W3086102808 @default.
- W2386760456 hasRelatedWork W3110497164 @default.
- W2386760456 isParatext "false" @default.
- W2386760456 isRetracted "false" @default.
- W2386760456 magId "2386760456" @default.
- W2386760456 workType "article" @default.