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- W2386843159 abstract "Introduce antireflection coating and passivation silicon nitride thin films deposited by pecvd. Apply pecvd to the product line of solar cells, and discover the passivation effect by pecvd in polycrystalline silicon solar cells.Analyze the mechanism of polycrystalline silicon solar cells passivated by PECVD." @default.
- W2386843159 created "2016-06-24" @default.
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- W2386843159 date "2008-01-01" @default.
- W2386843159 modified "2023-09-27" @default.
- W2386843159 title "The Si_xN_yH_z Passivation Study of Polycrystalline Silicon Solar Cells by PECVD" @default.
- W2386843159 hasPublicationYear "2008" @default.
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