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- W2386996898 abstract "Zinc oxide(ZnO) thin films were deposited on Si(100) by pulsed laser deposition(PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (10 7Ω·cm) of the films could be achieved by varing deposition ambient or annealing in pure oxygen at high temperature. Results above showed the ZnO films deposited by PLD met the demands for surface acoustic wave(SAW) devices." @default.
- W2386996898 created "2016-06-24" @default.
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- W2386996898 date "2001-01-01" @default.
- W2386996898 modified "2023-10-08" @default.
- W2386996898 title "Pulsed Laser Deposited Zinc Oxide Films for Surface Acoustic Wave Applications" @default.
- W2386996898 hasPublicationYear "2001" @default.
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