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- W2387007186 abstract "In this paper,the Moore's Law, Life and controversy are introduced.The ITRS 2001 and controversy for the chip feature size redution are introduced.The semicoductor technology and equipment that have influence on the life of the Moore's law are discussed,such as the lithography technology and eguipment,the wiring technology and eguipment,the nanosemiconductor technology and equipment.The proposal for the development of China's semiconductor equipment are advanced." @default.
- W2387007186 created "2016-06-24" @default.
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- W2387007186 date "2002-01-01" @default.
- W2387007186 modified "2023-09-23" @default.
- W2387007186 title "The Moore's Law and Semiconductor Equipment" @default.
- W2387007186 hasPublicationYear "2002" @default.
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