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- W2387258809 abstract "SiC coating was produced by isothermal chemical vapor deposition(CVD) on graphite substrate with trichloromethyl silicane (MTS)-H2-Ar system.Effects of deposition temperature and total gas pressure as well as gas flow rate on morphology and composition of the as-prepared coating were investigated.SEM and AFM observations show that the SiC particle size is less than 100 nm.Within the range of deposition condition in this experiment,coating morphology get coarser at higher Ar flow rate and thicker at elevated temperature.XRD and Raman scattering spectroscopy analysis demonstrate that the deposition coating mainly consists of 3C type β-SiC.Free silicon appears when total gas pressure and H2 flow rate are both increased.Free carbon appears when total gas pressure is low and H2 flow rate is high.The stoichiometric SiC can be obtained at 5 kPa when H2 flow rate is 500 mL·min-1." @default.
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- W2387258809 date "2010-01-01" @default.
- W2387258809 modified "2023-09-26" @default.
- W2387258809 title "Effects of deposition conditions on the morphology and composition of CVD SiC coating" @default.
- W2387258809 hasPublicationYear "2010" @default.
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