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- W2387434533 abstract "The experimental results of Czochralski silicon (CZ-Si) crystal growth in nitrogen at-mosphere are reported. The chemical reaction between silicon and nitrogen under reduced pres-sures is studied. Nitrogen gas flow under reduced pressure can eliminate the SiO smokes,and high yield of dislocation-free single crystals can be obtained. Silicon with low carbonconcentration grown by this method exhibits good electrical properties. Heat treatment be-haviours of the Si crystals have been studied. After tri-step intrinsic gettering heat treat-ment, ideal clean denuded zone is formed in Si-wafers." @default.
- W2387434533 created "2016-06-24" @default.
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- W2387434533 date "1991-01-01" @default.
- W2387434533 modified "2023-09-23" @default.
- W2387434533 title "CZOCHRALSKI SILICON CRYSTAL GROWTH IN NITROGEN ATMOSPHERE UNDER REDUCED PRESSURE" @default.
- W2387434533 hasPublicationYear "1991" @default.
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