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- W2387559934 abstract "The quality factor(Q value)of horizontal vibration comb silicon micro resonator based on SOI technology can reach above 105 quantity level in vacuum packaging.But under constant pressure,Q value often fall to 102 or even lower due to influence of air damping.Improving the quality of resonator will increases the Q value,however,the area of resonator will be increased and the isolation layer will hard to be released.Design,fabrication and test of a series of perforated silicon micro resonators are implemented in order to improve the Q value of the horizontal resonator by reducing air damping.The research has certain meaning for structure design of horizontal vibration resonator." @default.
- W2387559934 created "2016-06-24" @default.
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- W2387559934 date "2013-01-01" @default.
- W2387559934 modified "2023-09-28" @default.
- W2387559934 title "Comparison analysis on hole structure on air damping of horizontal vibration resonator" @default.
- W2387559934 hasPublicationYear "2013" @default.
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