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- W2387846147 abstract "In the paper an excimer laser lithography apparatus is described.This apparatus is applied in deep lithography for LIGA process successfully.The lithography experiment result shows us that excimer lasr deep lithography is very pratical to LIGA process." @default.
- W2387846147 created "2016-06-24" @default.
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- W2387846147 date "1998-01-01" @default.
- W2387846147 modified "2023-09-23" @default.
- W2387846147 title "The Application of Excimer Laser Deep Lithography in LIGA Process" @default.
- W2387846147 hasPublicationYear "1998" @default.
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