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- W2387975627 abstract "Lead zirconate titanate (Pb(Zr0.53Ti0.47)O3,PZT) ferroelectric films 2～60μm in thick- ness were successful1y fabricated on Pt-coated oxidized Si substrates(Pt/Ti/SiO2/Si) by a new sol gel processing. The microstructure and morphology of the prepared PZT thick films were inves- tigated via X-ray diffractometry and scanning electron microscopy techniques. X-ray diffraction patterns taken on these films show single-phase perovskite-type structure, and no pyrochlore phase exists in thick films, and SEM micrographs suggest that the PZT thick films are of high density, crack-free, and uniformity. Dielectric constant of 860, loss tangent of 0.03, remanent polarization of 25μC/cm2, a coercive field of 40kV/cm were measured on 50μm thick films." @default.
- W2387975627 created "2016-06-24" @default.
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- W2387975627 date "2001-01-01" @default.
- W2387975627 modified "2023-09-25" @default.
- W2387975627 title "Electrical Properties of Thick Lead Zirconate Titanate Films Fabricated Using a New Sol-Gel Processing" @default.
- W2387975627 hasPublicationYear "2001" @default.
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