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- W2389079457 abstract "In this paper,by means of DMD(digital micro-mirror device) for digital imaging lithography mask,with the chromium coating glass as the substrate,binary optical mask on it is made.CAD computer graphics file designed is output in BMP file format and then imported to the digital mask imaging system based on DMD.Through exposure,development,fixing,etching and the glue wiping-off,the required mask is obtained.This mask can be used for reduction projecting system and get a much smaller pattern on a wafer than on the mask so as to achieve the requirements of higher resolution." @default.
- W2389079457 created "2016-06-24" @default.
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- W2389079457 date "2010-01-01" @default.
- W2389079457 modified "2023-09-24" @default.
- W2389079457 title "Research and Implementation of Lithography Condensate System Based on Chrome Coating Glass" @default.
- W2389079457 hasPublicationYear "2010" @default.
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