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- W2389300169 abstract "A high performance multi channel optical monitor for coating has been designed and fabricated.A linear CCD is employed as the detector,and the design details of light source,receiver,and the fiber optics are given.It shown that the technique described in this paper allows for high accuracy control and high speed measurement,as well as allowing for monitoring multi layer filters." @default.
- W2389300169 created "2016-06-24" @default.
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- W2389300169 date "1999-01-01" @default.
- W2389300169 modified "2023-09-25" @default.
- W2389300169 title "A New Multifunction,High Speed Multi-channel Optical Thickness Monitor" @default.
- W2389300169 hasPublicationYear "1999" @default.
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